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Home > Products > AlN Substrate Wafer > 1 Inch AlN Single Crystal Substrate Wafer

1 Inch AlN Single Crystal Substrate Wafer

Dimension: 1 inch 25.4mm
PolyType: 2H Single Crystal
Thickness: 400um
Package: Cassette

Product Description

1 Inch AlN Single Crystal Substrate Wafer

HMT provides 1 inch AlN single crystal substrate wafers for semiconductor research, AlGaN epitaxy, high-power wide-bandgap devices and optoelectronic development. Aluminum nitride (AlN) combines a wide bandgap, high thermal conductivity, high breakdown field and strong chemical stability, making single-crystal AlN an attractive platform for advanced Al-rich AlGaN and other wide-bandgap semiconductor structures.

What Is an AlN Single Crystal Substrate Wafer?

An AlN single crystal substrate wafer is a wafer cut from bulk aluminum nitride crystal and processed for use as a crystalline growth or device-development platform. Compared with polycrystalline AlN ceramic substrates, single-crystal AlN provides a defined crystal structure and surface suitable for epitaxial semiconductor research.

AlN single crystal substrate waferThe 1 inch format corresponds to approximately 25.4 mm in diameter, making it suitable for laboratory-scale epitaxy, material evaluation, device research and process development. HMT can discuss wafer orientation, thickness, surface finish and other specifications according to the intended application.For applications requiring established wide-bandgap substrate technologies, HMT also supplies 4H-SiC substrate wafers for power and RF semiconductor development.

AlN Substrate for AlGaN Epitaxy

One important research direction for single-crystal AlN is the epitaxial growth of Al-rich AlGaN. A bulk AlN substrate provides a chemically compatible III-nitride surface for developing high-aluminum-content AlGaN layers and related heterostructures.

Recent research has demonstrated high-voltage AlGaN-channel HEMTs grown on bulk AlN substrates. In one 2025 IEEE study, an Al₀.₆₅Ga₀.₃₅N-channel HEMT on bulk AlN achieved breakdown voltages above 2.7 kV, illustrating the potential of the AlN/AlGaN material platform for high-voltage semiconductor research.

For comparison, HMT also provides AlGaN/GaN epitaxial wafers using engineered AlN buffer structures on silicon substrates.

AlN for High-Power Semiconductor Research

Aluminum nitride (AlN) has attracted attention for advanced power electronics because of its wide bandgap, high critical electric field, high-temperature stability and strong resistance to harsh operating environments. These properties make AlN and Al-rich AlGaN material systems promising candidates for the development of high-voltage and high-temperature semiconductor devices.

A key research direction is the development of high-quality single-crystal AlN substrates with low defect density for the epitaxial growth of Al-rich AlGaN layers. Compared with conventional foreign substrates, a bulk AlN substrate provides a closely related III-nitride crystal platform for AlGaN epitaxy and can support the development of high-quality Al-rich semiconductor structures.

Al-rich AlGaN grown on bulk AlN is being investigated for high-voltage transistors and other wide-bandgap power devices. Recent research has demonstrated AlGaN-channel HEMTs on bulk AlN with breakdown voltages above 2.7 kV, highlighting the potential of the AlN/AlGaN material system for next-generation high-voltage power electronics.

AlN in Optoelectronics and UV Devices

AlN is also relevant to ultraviolet optoelectronics because its wide bandgap and III-nitride crystal structure provide a suitable material platform for Al-rich nitride semiconductor development. High-aluminum-content AlGaN is particularly important for deep-ultraviolet optoelectronic research.

In addition to power electronics, AlN-based material systems can therefore support research into UV LEDs, UV laser structures, photodetectors and other wide-bandgap optoelectronic devices. The specific device performance depends on epitaxial layer composition, defects, doping, strain and subsequent device processing.
AlN wafer for UAV-LED


Typical AlN Substrate Parameters

The specification of an AlN single crystal wafer should be selected according to the intended epitaxial and device process. Typical parameters to define include:

Material
Aluminum Nitride (AlN)
Crystal Single crystal AlN
Diameter 1 inch / approximately 25.4 mm
Polytype
2H
Thickness
400±50um
Grade
Research
Surface Roughness
Al ≤0.5nm


AlN Substrate Wafer Supplier for R&D

HMT focuses on semiconductor substrate materials including SiC and GaN wafers and can extend its substrate portfolio to application-specific AlN wafer requirements. The company's existing product range includes GaN substrates, GaN epitaxial wafers and SiC substrates used for power, RF and optoelectronic semiconductor development.

For a 1 inch AlN single crystal substrate wafer, customers can provide the required diameter, thickness, orientation, surface finish and intended application when requesting a quotation. This allows the wafer specification to be matched more closely with the subsequent epitaxy or device-development process.


Applications of 1 Inch AlN Single Crystal Substrates

Typical research and development applications include:

  • High-voltage AlGaN HEMTs
  • Wide-bandgap power semiconductor research
  • UV LED and UV optoelectronic research
  • High-temperature semiconductor devices
  • Epitaxial process development
  • University and laboratory semiconductor research

HMT's semiconductor material portfolio also includes SiC epitaxial wafers for power semiconductor development.
AlN substrate for high-voltage AlGaN HEMT

Frequently Asked Questions

What is the diameter of a 1 inch AlN substrate wafer?

A 1 inch AlN substrate wafer has a nominal diameter of approximately 25.4 mm.

What is an AlN single crystal substrate used for?

An AlN single crystal substrate can be used as a crystalline platform for AlGaN epitaxy, wide-bandgap semiconductor research, UV optoelectronics and high-voltage device development.

Can Al-rich AlGaN be grown on an AlN substrate?

Yes. Bulk AlN is an important substrate platform for research on Al-rich AlGaN epitaxy. Recent IEEE research has demonstrated Al-rich AlGaN-channel HEMTs on bulk AlN with breakdown voltages above 2.7 kV.



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